著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L.",Selected papers on optical microlithography,,SPIE Optical Engineering Press,1992,SPIE milestone series,,"0819409855,0819409863",,https://cir.nii.ac.jp/crid/1130000795550357632