著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Ehrlich, Daniel J. and Higashi, Gregg S. and Oprysko, Modest Michael and Materials Research Society","Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA",,Materials Research Society,1988,Materials Research Society symposium proceedings,,0931837693,,https://cir.nii.ac.jp/crid/1130000795554608640