著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Boning, Duane S. and Devriendt, Katia and Oliver, Michael R. and Stein, David J.","Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.",,Materials Research Society,2003,Materials Research Society symposium proceedings,,1558997040,,https://cir.nii.ac.jp/crid/1130000795558628352