著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Interconnects, Contact Metallization, and Multilevel Metallization and Symposium on Reliability for Semiconductor Devices, Interconnects, and Thin Insulator and Herndon, T. O. and Rathore, H. S. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division","Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials",,Electrochemical Society,1993,Proceedings,,156677067X,,https://cir.nii.ac.jp/crid/1130000795563259008