著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Process Physics and Modeling in Semiconductor Technology and Srinivasan, G. R. and Taniguchi, K. and Murthy, C. S. and Electrochemical Society. Electronics Division",Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology,,Electrochemical Society,1993,Proceedings,,1566770645,,https://cir.nii.ac.jp/crid/1130000795603065856