著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L. and International Society for Hybrid Microelectronics and Society of Photo-optical Instrumentation Engineers","Optical microlithography IV : March 13-14, 1985, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1985,Proceedings,,0892525738,,https://cir.nii.ac.jp/crid/1130000795637276928