著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Microelectronic Device Technology and Burnett, David and Wristers, Dirk and Tsuchiya, Toshiaki and Society of Photo-optical Instrumentation Engineers and Solid State Technology (Organization)","Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California",,SPIE,1998,Proceedings,,0819429651,,https://cir.nii.ac.jp/crid/1130000795643109888