著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Andricacos, P. C. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division",Electrochemical processing in ULSI fabrication III : proceedings of the international symposium,,Electrochemical Society,2002,Proceedings,,1566772737,,https://cir.nii.ac.jp/crid/1130000795696222464