著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Highly Selective Dry Etching and Damage Control and Mathad, G. S. and Horiike, Y.",Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control,,Electrochemical Society,1993,Proceedings,,1566770661,,https://cir.nii.ac.jp/crid/1130000795698259712