著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics and Mathad, G. S. and Baker, B. C. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division and Electrochemical Society. Electrodeposition Division and Electrochemical Society. Meeting","Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium",,Electrochemical Society,2003,Proceedings,,1566773792,,https://cir.nii.ac.jp/crid/1130000795701430656