著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Workshop on Tungsten and Other Refractory Metals for VLSI Applications III and Wells, Victor A. and McConica, Carol M. and Materials Research Society","Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A.",,Materials Research Society,1988,Materials Research Society conference proceedings,,0931837847,,https://cir.nii.ac.jp/crid/1130000795770524800