著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Smith, James H. and Karam, Jean-Michel and Society of Photo-optical Instrumentation Engineers and Solid State Technology (Organization)","Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California",,SPIE,1999,Proceedings,,081943471X,,https://cir.nii.ac.jp/crid/1130000795828296320