著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Society of Photo-optical Instrumentation Engineers and Duparré, Angela and Singh, Bhanwar","Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA",,SPIE,2001,Proceedings,,0819441635,,https://cir.nii.ac.jp/crid/1130000795898456832