著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Rai-Choudhury, P.",Micromachining and microfabrication,,"SPIE Optical Engineering Press,Institution of Electrical Engineers",1997,IEE materials & devices series,,"0819423793,0852969112",,https://cir.nii.ac.jp/crid/1130000795907028352