著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Cost and Performance in Integrated Circuit Creation (Conference) and Wong, Alfred Kwok-Kit and Monahan, Kevin M. and Society of Photo-optical Instrumentation Engineers","Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA",,SPIE,2003,Proceedings,,0819448486,,https://cir.nii.ac.jp/crid/1130000795921484288