著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Singh, Rajiv K and Bajaj, Rajeev and Moinpour, Mansour and Meuris, Marc","Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.",,"Materials Research Society,Cambridge University Press",2013,Materials Research Society symposium proceedings,,9781107413146,,https://cir.nii.ac.jp/crid/1130000795959765504