著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "和佐, 清孝 and 北畠, 真 and 足立, 秀明",Thin film materials technology : sputtering of compound materials,,"William Andrew Pub.,Springer",2004,,,"0815514832,3540211187",,https://cir.nii.ac.jp/crid/1130000796039227520