著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Albrecht, Tim and Microelectromechanical Systems-Materials and Devices and Materials Research Society and Materials Research Society. Meeting","MEMS, bioMEMS and bioelectronics : materials and devices : symposium held November 28-December 2 2011, Boston, Massachusetts, U.S.A.",,"Materials Research Society,Cambridge University Press",2012,Materials Research Society symposium proceedings,,9781605113920,,https://cir.nii.ac.jp/crid/1130000796079491200