著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) and Heyns, Marc and Mertens, Paul and Meuris, Marc","Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000",,Scitec Publications,2001,Diffusion and defect data : solid state data,,3908450578,,https://cir.nii.ac.jp/crid/1130000796107521024