著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Gordon, Colin G. and Society of Photo-optical Instrumentation Engineers","Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California",,SPIE,1992,Proceedings,,0819407577,,https://cir.nii.ac.jp/crid/1130000796110834304