著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Lawton, Russell A. and Society of Photo-optical Instrumentation Engineers and Solid State Technology (Organization)","MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California",,SPIE,1999,Proceedings,,0819434779,,https://cir.nii.ac.jp/crid/1130000796110990848