著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
International Mechanical Engineering Congress and Exposition and American Society of Mechanical Engieers. Micro Electro Mechanical Systems Subdivision,"Micro-electro-mechanical systems (MEMS) 2002 : presented at the 2002 ASME International Mechanical Engineering Congress and Exposition, November 17-22, 2002, New Orleans, Louisiana",,American Society of Mechanical Engineers,2002,MEMS,,0791836428,,https://cir.nii.ac.jp/crid/1130000796119988480