著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Lin, Burn Jeng and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering",,SPIE,1989,Proceedings,,0819401234,,https://cir.nii.ac.jp/crid/1130000796149329664