著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Nyyssonen, Diana and United States. National Bureau of Standards","Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia",,SPIE--the International Society for Optical Engineering,1984,Proceedings,,0892525150,,https://cir.nii.ac.jp/crid/1130000796171042560