著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kraft, Michael and White, Neil (Neil M.)",MEMS for automotive and aerospace applications,,Woodhead Publishing,2013,Woodhead Publishing series in electronic and optical materials,,9780857091185,,https://cir.nii.ac.jp/crid/1130000796231227264