著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
Atomic Layer Deposition Applications and Electrochemical Society. Meeting and Electrochemical Society. Dielectric Science and Technology Division,Atomic layer deposition applications,,Electrochemical Society,2007,ECS transactions,,"9781566775427,9781566775731",,https://cir.nii.ac.jp/crid/1130000796234136832