著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L. and Society of Photo-optical Instrumentation Engineers","Optical microlithography VI : 4-5 March 1987, Santa Clara, California",,SPIE,1987,Proceedings,,0892528079,,https://cir.nii.ac.jp/crid/1130000796296999936