著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Valiev, Kamilʹ Akhmetovich",The physics of submicron lithography,,Plenum Press,1992,Microdevices : physics and fabrication technologies,,0306435780,,https://cir.nii.ac.jp/crid/1130000796309229824