著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Bechtold, T. and Rudnyi, E. B. and Korvink, J. G.",Fast simulation of electro-thermal MEMS : efficient dynamic compact models,,Springer,2006,Microtechnology and MEMS,,9783540346128,,https://cir.nii.ac.jp/crid/1130000796335474048