著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Smith, James H. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International","Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California",,SPIE,1998,Proceedings,,0819429708,,https://cir.nii.ac.jp/crid/1130000796337569024