著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Microelectromechanical System - Materials and Devices and Materials Research Society. Meeting and Boeckl, John J. and Candler, Robert N. and DelRio, Frank W. and Morral, Anna Fontcuberta i and Jagadish, Chennupati and Keimei, Chris and Silva, Helena and Voss, Tobias and Xiong, Qihua","Micro- and nanoscale systems - novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A.",,"Materials Research Society,Cambridge University Press",2014,Materials Research Society symposium proceedings,,9781605116365,,https://cir.nii.ac.jp/crid/1130000796371181440