著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology and Kittler, M. and Richter, H.","Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009",,Trans Tech Pub.,2010,Diffusion and defect data : solid state data,,9783908451747,,https://cir.nii.ac.jp/crid/1130000796372461952