著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Gupta, Dinesh C. and Brown, George A.","Gate dielectric integrity : material, process, and tool qualification",,ASTM,2000,ASTM special technical publication,,0803126158,,https://cir.nii.ac.jp/crid/1130000796400078848