著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Conference on Characterization and Metrology for ULSI Technology and Seiler, David G. and Diebold, A. C. (Alain C.) and Shaffner, Thomas J. and McDonald, Robert and Zollner, Stefan and Khosla, Rajinder P. and Secula, Erik M.","Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003",,American Institute of Physics,2003,AIP conference proceedings,,0735401527,,https://cir.nii.ac.jp/crid/1130000796435737600