著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Chemical Mechanical Planarization and Raghavan, S. (Srini) and Opila, Robert Leon and Zhang, L. and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Meeting",Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing,,Electrochemical Society,1998,Proceedings,,156677201X,,https://cir.nii.ac.jp/crid/1130000796465148544