著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Heyns, Marc and Meuris, Marc and Mertens, Paul","Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998",,Scitec Publications Ltd,1999,Diffusion and defect data : solid state data,,3908450403,,https://cir.nii.ac.jp/crid/1130000796484709888