著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Lin, Burn Jeng and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography : 2-4 March 1988, Santa Clara, California",,SPIE,1988,Proceedings,,0892529571,,https://cir.nii.ac.jp/crid/1130000796647554688