著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pang, Stella W. and Chang, Shih-Chia and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and National Institute of Standards and Technology (U.S.)","Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas",,SPIE--The International Society of Optical Engineering,1996,Proceedings,,0819422770,,https://cir.nii.ac.jp/crid/1130000796714219904