著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Roozeboom, Fred and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. High Temperature Materials Division",Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium,,Electrochemical Society,2003,Proceedings,,"1566773962,1566774063",,https://cir.nii.ac.jp/crid/1130000796774101248