著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Andricacos, P. C. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division and Electrochemical Society. Electrodeposition Division","Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability",,Electrochemical Society,1999,Proceedings,,1566772001,,https://cir.nii.ac.jp/crid/1130000796775755008