著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Symposium on Materials and Processes for Microelectronic Systems and Nair, K. M. and Pohanka, R. and Buchanan, R. C. and Ceramic Science and Technology Congress",Materials and processes for microelectronic systems,,American Ceramic Society,1990,Ceramic transactions,,0944904319,,https://cir.nii.ac.jp/crid/1130000796778709504