著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Ruddell, Richard L. and Society of Photo-optical Instrumentation Engineers","Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California",,The Society,1978,Proceedings of the Society of Photo-Optical Instrumentation Engineers,,0892521627,,https://cir.nii.ac.jp/crid/1130000796836460416