著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Bergmann, Neil W. and Reinhold, Olaf and Tien, Norman C. and Society of Photo-optical Instrumentation Engineers and IREE Society and Queensland Government State Development","Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia",,SPIE--the International Society of Optical Engineering,1999,Proceedings,,0819434922,,https://cir.nii.ac.jp/crid/1130000796873368064