著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Design, Characterization, and Packaging for MEMS and Microelectronics (Conference) and Courtois, B. (Bernard) and Demidenko, S. N. (Sergeĭ Nikolaevich) and Society of Photo-optical Instrumentation Engineers and IREE Society and Queensland. Government State Development","Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia",,SPIE,1999,Proceedings,,0819434949,,https://cir.nii.ac.jp/crid/1130000796875676672