Author,Title,Edition,Publisher,Year,Series,Number,ISBN,ISSN,URL "Ree, Moonhor and Yoon, Jinhwan and Heo, Kyuyoung","Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties",,Nova Science Publishers,2010,Novinka,,9781616687496,,https://cir.nii.ac.jp/crid/1130000796890099584