著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Nalamasu, Omkaram and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing XI : 28 February-1 March 1994, San Jose, California",,SPIE,1994,Proceedings,,0819414905,,https://cir.nii.ac.jp/crid/1130000796921007104