著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Hsu, Tai-Ran",MEMS & microsystems : design and manufacture,International ed,McGraw-Hill,2002,McGraw-Hill international editions,,0071204768,,https://cir.nii.ac.jp/crid/1130000796932382464