著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Electrochemical Society. Dielectric Science and Technology Division and American Ceramic Society. Electronics Division. Fall Meeting and Mathad, G. S. and Hess, Dennis W.",Proceedings of the tenth symposium on plasma processing,,"the Electrochemical Society, Inc.",1994,Proceedings,,1566770777,,https://cir.nii.ac.jp/crid/1130000796935282048