著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Babu, S.V.","Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.",,Materials Research Society,2000,Materials Research Society symposium proceedings,,1558994734,,https://cir.nii.ac.jp/crid/1130000796954897792