著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pauleau, Y. and NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies",Chemical physics of thin film deposition processes for micro- and nano-technologies,,Kluwer Academic,2002,NATO science series,,"1402005245,1402005253",,https://cir.nii.ac.jp/crid/1130000796966642048